Diffusion in Silicon : (Record no. 127322)

000 -LEADER
fixed length control field 02889nam a22004693i 4500
001 - CONTROL NUMBER
control field EBC1867695
003 - CONTROL NUMBER IDENTIFIER
control field MiAaPQ
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20181121174531.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION
fixed length control field m o d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cnu||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 181113s2005 xx o ||||0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783038130314
-- (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9783908451112
035 ## - SYSTEM CONTROL NUMBER
System control number (MiAaPQ)EBC1867695
035 ## - SYSTEM CONTROL NUMBER
System control number (Au-PeEL)EBL1867695
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10777887
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)607839769
040 ## - CATALOGING SOURCE
Original cataloging agency MiAaPQ
Language of cataloging eng
Description conventions rda
-- pn
Transcribing agency MiAaPQ
Modifying agency MiAaPQ
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number QD181.S6.D54 2005eb
082 0# - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 620.193
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Fisher, David J.
245 10 - TITLE STATEMENT
Title Diffusion in Silicon :
Remainder of title A Seven-Year Retrospective.
250 ## - EDITION STATEMENT
Edition statement 1st ed.
264 #1 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Durnten :
Name of publisher, distributor, etc Trans Tech Publications, Limited,
Date of publication, distribution, etc 2005.
264 #4 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Date of publication, distribution, etc ©2005.
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource (210 pages)
336 ## - CONTENT TYPE
Content type term text
Content type code txt
Source rdacontent
337 ## - MEDIA TYPE
Media type term computer
Media type code c
Source rdamedia
338 ## - CARRIER TYPE
Carrier type term online resource
Carrier type code cr
Source rdacarrier
490 1# - SERIES STATEMENT
Series statement Defect and Diffusion Forum ;
Volume number/sequential designation v.241
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Intro -- Diffusion in Silicon - A Seven-Year Retrospective -- Table of Contents -- Abstracts.
520 ## - SUMMARY, ETC.
Summary, etc This collection of abstracts of experimental and theoretical papers on the subject of diffusion in silicon is intended to complement earlier volumes (DDF153-155) which covered the previous decade's work on the same topic.The abstracts are grouped according to the diffusing species in question. The latter comprise Ag, Al, As, Au, B, Ba, Be, C, Ca, Cl, Co, Cr, Cu, Er, F, Fe, Ge, H, He, Hf, In, Ir, K, Mg, Mn, Mo, N, Na, Nb, Ni, O, P, Pb, Pt, Rb, Sb, Se, Si, SiH3, Sn, Ti, V, Yb and Zn with regard to bulk diffusion, Ag, Au, Ba, Cl, Cu, Er, F, Ga, Ge, In, O, Pb, Sb, Si, SiH3, Sn and Y with regard to surface diffusion, H with regard to grain-boundary diffusion, and self-diffusion in liquid Si.In a separate section, diffusion in SiGe alloys is covered. The work on bulk diffusion here involves the diffusants: As, Au, B, Cu, Ge, H, Li, P, Sb or Si.Overall, this succinct up-to-date guide to the topic of diffusion in silicon will be useful to anyone involved in the theory, development or processing of silicon-based semiconductors.
588 ## - SOURCE OF DESCRIPTION NOTE
Source of description note Description based on publisher supplied metadata and other sources.
590 ## - LOCAL NOTE (RLIN)
Local note Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2018. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Diffusion.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon -- Analysis.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon.
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Print version:
Main entry heading Fisher, David J.
Title Diffusion in Silicon : A Seven-Year Retrospective
Place, publisher, and date of publication Durnten : Trans Tech Publications, Limited,c2005
International Standard Book Number 9783908451112
797 2# - LOCAL ADDED ENTRY--CORPORATE NAME (RLIN)
Corporate name or jurisdiction name as entry element ProQuest (Firm)
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title Defect and Diffusion Forum
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://ebookcentral.proquest.com/lib/buse-ebooks/detail.action?docID=1867695">https://ebookcentral.proquest.com/lib/buse-ebooks/detail.action?docID=1867695</a>
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